Vacuum Microsystems for Energy Conversion

Vacuum Microsystems for Energy Conversion

#Vacuum #Microsystems #Energy #Conversion

“ISR UMD”

Roger T. Howe
Dept. of Electrical Engineering
Stanford Nanofabrication Facility
Stanford University
Palo Alto, Calif.

Host
Ian White

Abstract
Micro and nano-fabricated sensors (e.g., accelerometers and gyroscopes) and actuators (light valve chips for projection and cell-phone displays) have…

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